3D‐Printed Electrostatic Microactuators for Flexible Microsystems

Developing small-scale, lightweight, and flexible devices with integrated microactuators is one of the critical challenges in wearable haptic devices, soft robotics, microrobotics. In this study, a novel fabrication process that leverages benefits 3D printing two-photon polymerization printed circuit boards (FPCBs) presented. This method enables microsystems 3D-printed electrostatic microactuators, which are demonstrated micromirror array legged microrobot mass 4 mg. actuators on FPCBs robust enough to actuate micromirrors while device deformed, they easily off-the-shelf electronics. The crawling robot lightest microrobots actuated without external fields, legs enable locomotion speed 0.27 body length per second. proposed framework opens up pathway toward variety highly microsystems.